1400℃双温区CVD系统是由1400℃双温区管式炉、混气系统、真空系统组成。1400℃双温区管式炉均采用双层壳体结构，标配30段程序控温系统，炉膛采用氧化铝多晶纤维材料，双层炉壳间配有风冷系统，能快速升降温。该炉具有温场均衡、表面温度低、升降温度速率快、节能等点，是高校、科研院所、工矿企业做高温烧结、金属退火、质量检测用的高温设备。

The 1400 double temperature zone CVD system is composed of 1400 double temperature zone tube furnace, gas mixing system and vacuum system. The 1400 double temperature zone tubular furnace adopts double shell structure and 30 section program temperature control system as standard. The furnace is made of alumina polycrystalline fiber material. The double-layer furnace shell is equipped with air cooling system, which can quickly raise and lower the temperature. The furnace has the advantages of balanced temperature field, low surface temperature, fast rising and falling temperature rate, energy saving and so on. It is a high temperature equipment for high temperature sintering, metal annealing and quality inspection in universities, scientific research institutes and instrial and mining enterprises.

CVD系统由供气系统+管式炉+抽气系统，采用双层壳体结构，炉膛采用氧化铝多晶纤维材料。双温区的管式炉每个温区可以立控制、设置不同的温度。供气系统是流量调节可以是质子流量计或浮子流量计，混气路数可以是2路、3路、4路、5路相混合。

The CVD system is composed of gas supply system, tubular furnace and air extraction system. The double shell structure is adopted. The furnace is made of alumina polycrystalline fiber. Each temperature zone of tubular furnace with double temperature zones can be controlled and set with different temperatures independently. The gas supply system is a flow regulator, which can be a proton flowmeter or a rotameter, and the number of gas mixing channels can be 2, 3, 4, 5 mixed.

双温区管式炉,有两个加热区。每个加热区可以实现立控温，控温仪表采用宇电程序控温仪表，智能操作。

Double temperature zone tubular furnace, with two heating zones. Each heating zone can realize independent temperature control. The temperature control instrument adopts Yudian program temperature control instrument, which is intelligent operation.

1400双温区CVD系统配置：

1400 al temperature zone CVD system configuration:

一、T1400双温区CVD系统控温仪表：采用宇电程序控温仪表。（可选配日本岛电，英国欧陆等质品牌）

1、 Temperature control instrument of tf1400 al temperature zone CVD system: Yudian program temperature control instrument is adopted. (it can be equipped with imported brands such as Japan island power and UK continental)

1、30段程序控温智能PID调节。（可选配50段程序仪表或液晶触摸屏仪表）

1. 30 segment program temperature control intelligent PID regulation. (50 segment program instrument or LCD touch screen meter can be selected)

2、具有过温保护、断偶保护，过温或断偶时电炉加热电路会自动切断，（当电炉温度超过1200度或热电偶烧断时，主电路上的交流继电器会自动断开，主电路断开，面板上ON灯熄灭，OFF灯亮，有限的保护电炉）。

2. It has over temperature protection and disconnection protection. The heating circuit of electric furnace will be cut off automatically in case of over temperature or disconnection. (when the temperature of electric furnace exceeds 1200 ℃ or the thermocouple is burnt out, the AC relay on the main circuit will be automatically disconnected, the main circuit will be disconnected, the on light on the panel will be off, the off light will be on, and the limited protection furnace will be provided).

3、带有485通讯接口（选购软件时标配）

3. With 485 communication interface (standard configuration when purchasing software)

4、具有断电保护功能，即断电后再给电启动炉子时、程序不是从起始温度开始升、而是从断电时炉温开始升。

4. It has the function of power-off protection, that is, when starting the furnace after power-off, the program does not start from the initial temperature, but starts to rise when the power is off.

5、仪表具有温度自整定的功能。

5. The instrument has the function of temperature self-tuning.

二、T1400双温区CVD系统开门保护系统：该炉安装有行程开关，当炉盖打开时会自动切断电源，有效地保证使用者。

2、 Tf1400 double temperature zone CVD system door opening protection system: the furnace is equipped with a travel switch, when the furnace cover is opened, it will automatically cut off the power supply, effectively ensure users.

三、炉膛材料：采用氧化铝多晶纤维材料，不掉粉、材料保温性能好、反射率高、温场均衡，抗热涨冷缩能力强。

3、 Furnace material: adopt alumina polycrystalline fiber material, no powder, good heat preservation performance, high reflectivity, balanced temperature field, strong resistance to heat expansion and cold contraction.

四、加热元件：采用良的加热元件，温场均衡、使用寿命长。

4、 Heating element: excellent heating element, balanced temperature field and long service life.

五、漏电保护功能：该炉装了漏电空气开关，当炉体漏电或电流超过额定电流时空开会自动关闭以切断电源。

5、 Leakage protection function: the furnace is equipped with leakage air switch. When the furnace leakage or current exceeds the rated current, the meeting will automatically shut down to cut off the power supply.

六、软件控制系统（选购）：该炉配有通讯接口和软件，可以直接通过电脑控制炉子的各个参数，并能从电脑上观察到炉子上PV和SV温度值和仪表的运行情况，炉子的实际升温曲线电脑会实时绘出，并能把每个时刻的温度数据保存起来，随时可以调出。

6、 Software control system (optional): the furnace is equipped with communication interface and software, which can directly control the parameters of furnace through computer, and observe the temperature value of PV and SV on the furnace and the operation of the instrument from the computer. The actual temperature rise curve of the furnace will be drawn by the computer in real time, and the temperature data of each moment can be saved and can be called out at any time.

七、控制系统：

7、 Control system:

1、电器：正泰，

1. Electrical appliances: Chint,

2、可控硅：德国西门康106/16E，

2. Silicon controlled rectifier: Siemens 106 / 16e, Germany,

3触发器：移相触发。

3 trigger: phase shift trigger.

八、选配件：

8、 Options:

1、50段程序控温，

1. 50 stage program temperature control,

2、液晶触摸屏控制器或质温度控制器

2. LCD touch screen controller or imported temperature controller

3、炉膛尺寸可定做

3. Furnace size can be customized

4、可增加进气、排气阀门5、炉膛材料可选质材料6、可选UL认证电器板

4. 5. Furnace material can be imported. 6. UL certified electrical board can be selected

7、电器部分可选配ABB产品8、可根据客户需求定做各种非标型号产品

7. ABB procts can be selected for electrical parts. 8. Various non-standard procts can be customized according to customer requirements

1400双温区CVD系统技术参数：

Technical parameters of 1400 al temperature zone CVD system:

1、设备名称：1400双温区CVD系统

1. Equipment name: 1400 double temperature zone CVD system

2、炉管长度：Φ60X1200mmΦ80X1200mm

2. Length of furnace tube: Φ 60x1200 mm, Φ 80x1200 mm

3、额定温度：1400℃

3. Rated temperature: 1400 ℃

5、长期使用温度：1350℃

5. Long term service temperature: 1350 ℃

6、各温区加热段：210mm+210mm

6. Heating section of each temperature zone: 210mm + 210mm

7、热电偶：S型

7. Thermocouple: S type

8、升温速率：≤10℃/min

8. Heating rate: ≤ 10 ℃ / min

9、加热元件：硅碳棒

9. Heating element: silicon carbide rod

10、温控方式：智能化30段可编程控制

10. Temperature control mode: intelligent 30 segment programmable control

11、功率：7KW

11. Power: 7KW

12、电压：220V

12. Voltage: 220 V